Damping and Tracking Control Schemes for Nanopositioning
نویسندگان
چکیده
منابع مشابه
A second-order controller for resonance damping and tracking control of nanopositioning systems
This paper presents a simple second-order controller that damps the resonance typical of piezoelectric nanopositioners and delivers good tracking performance. This method employs the Integral Resonant Control scheme (IRC) for damping the dominant resonant mode of the piezoelectric nanopositioner and uses an integral controller to achieve tracking performance. As disturbance rejection is a main ...
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High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioining stages, provide excellent position control when driven at relativ...
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ژورنال
عنوان ژورنال: IEEE/ASME Transactions on Mechatronics
سال: 2014
ISSN: 1083-4435,1941-014X
DOI: 10.1109/tmech.2013.2242482